The HsensorX038 is a Wafer Mapping sensor which detects presence of wafer in cassette, FOUP, etc. Sensor can detect proper positioned wafer and cross-loted wafer as well.
Sensor unique design allows detection of all kinds of wafers (different sizes, coatings, thicknesses..). Hsensor has standof of 38mm, different distances are also available. Call Metralight for addditional information.
- Detect Nitride Coated Wafers
- Solid State Class 1 Laser Diode (785nm)
- LED Bar Displays Reflected Light and Treshold Level
- Low Power Consumtion (80mA)
- Electrically and Mechanically Compatible with Industry Standard Sensors
- Supression of Ambient Light (Sunlight, Fluorescent,..)
- Custom Form Factors is Available (NRE charges may apply)
| Detection Method | Laser Beam with Photodetectors |
| Light Source | 780 nm Class I Laser Diode (0.050mW max. power) |
| Detecting Distance | 1.5” (38mm) or custom (2”/ 3”/ 4’) |
| Response Time | ON delay 38µs max. / OFF delay 5ms min (user selectable) |
| Laser Spot Size | 12.7 mm x 0.15 mm |
| Angular Coverage | +17°,-25° (relative to the sensor front surface) |
| Detectable Wafers | 3” to 12”, Different Thicknesses and Coatings (including Nitride wafers) |
| Power | 8 to 24 VDC / 100mA max. |
| Settings | Pin Hole for Threshold Adjustment |
| Interface (Input and Output) | 4 Wire Cable |
| Indicators | Green LED = Sensor ON ; Blue LED = Object Present; LED Bar |
| Output | NPN Open Collector (internal or external pull-up resistor), 80 mA max. |
| Materials | Aluminum Case, Glass Lenses, RG9 Filter |
| Overall Dimensions | 3.3” x 3.25” x 0.65” (83.8 mm x 82.6 mm x 16.5 mm) |
| Weight | 3.2 oz (92 g) |